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The
laboratory (MMLab) was founded in May 1988 and officially opened in
October 1991. It is the only key laboratory that specializes in surface
modification of materials by different energetic beams such as plasma,
ion,electron and laser. Research activities of the laboratory cover
three areas, i.e. surface modification and characterization,
interactions between energetic beams and surfaces, and new synthesis
techniques and instruments.
There are four types of instruments in the laboratory:
(1) Plasma enhanced CVD and PVD such as Plasma Enhanced MOCVD, Plasma
Source Ion Implantation, RF plasma enhanced magnetron sputtering, and
arc deposition.
(2) Linear ion implanters such as MEVVA and pulsed ion beam
(3) High-current Pulsed electron beam
(4) Laser beam |